ion beam deposition

基本解释

He studied physics at the Universities of Bremen and Konstanz, and completed his PhD thesis entitled "Diamond-like materials prepared via mass selected ion beam deposition" in 1996.
博士论文主题为离子质量选择法制备类金刚石材料，离子束沉积的类金刚石薄膜。
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The various preparation methods of a-C:H thin films, including plasma deposition, ion beam deposition, sputtering and chemical vapor deposition, were described in detail in this paper.
本文详细介绍了a-C∶H 薄膜的各种制备方法，包括等离子体淀积法、离子束法、溅射法和化学汽相淀积法等，给出了某些典型的实验条件。
A novel type of end Hall ion source has been successfully developed for optical thin film growth by ion beam assisted deposition (IBAD).
研制了一种用于离子束辅助沉积光学薄膜的端部霍尔等离子体离子源，论述了该源的工作原理以及伏安特性。